Since 2007, Caltech’s Kavli Nanoscience Institute (KNI) in Pasadena, CA USA and CEA/Leti – Minatec in Grenoble, France have together forged the Alliance for Nanosystems VLSI (very-large-scale-integration) to make real the oft-cited potential of nanoscale systems. To date, very few beachheads have been attained in this domain – largely due to the monumental challenge of merging the separate methodologies of nanoscale bio/chemical sensor device fabrication with state-of-the-art, foundry-scale microelectronics processing.
Leti/Minatec researchers are now collaborating with Caltech/KNI scientists to transform nanotechnology-based prototypes into robust, complex sensing systems. The initial focus is on large-scale integration of bio/chemical sensors. This involves metamorphosing nanoscale methodologies that have driven innovative research into well-validated microelectronic foundry processes at the wafer scale. Engaged in this effort are researchers working in the areas of chemical functionalization, NEMS device physics, sensor array architectures, integrated microfluidics, multiplexed multichannel electronic readout systems, and informatics-based signature detection algorithms.

The NanoVLSI Alliance opens new application opportunities based on its NEMS platform with a strong focus on three main areas:

-high sensitivity gas-phase chemical sensors including preanalytical and chemical separation modules;

-liquid-phase biochemical sensor for pharmaceutical research and point-of-care diagnostics and;

-vacuum-based ultra-high resolution mass spectrometer.

In March 2009 a dedicated Sponsoring Program has been launched to adequately design and accelerate delivery to the market of these innovations while enabling close interaction between the Alliance and leading industry players.

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