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Contact: Fabrice Geiger (fabrice.geiger@cea.fr)
Innovation in mind!
An integral part of a national network of high-tech platforms, the MOS and MEMS technology platforms bring together Leti’s resources for conducting applied research in micro- and nanotechnology.
Key platforms for the development of innovative processes
Two Leti technology platforms are bridging the gap between upstream research and development of new micro and nanotechnology applications. The MOS 200/300 platform provides 200mm and 300mm CMOS wafer processing, which can be applied to both semiconductor and microsystem devices. The MEMS200 platform produces non-CMOS Micro-ElectroMechanical Systems (MEMS).
Both platforms are focused on the “More than Moore” initiative to develop new semiconduct
Open to universities and industry,
as well as to other high-tech platforms, it also receives research from the researchers of applied laboratories (e.g. Liten, CNRS/LTM)
During 2010, an innovative moving cleanroom system linked the two platforms, adding process flexibility and faster processing. Together, the two programs have 6,500m² of cleanroom space, 500 process tools and a combined staff of more than 450 people.
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