The Nano-Characterization Platform, now known as PFNC, covers a large domain of competencies, including electron microscopy, X-ray diffraction, surface analysis and sample preparation. The PFNC comprises more than 40 state-of-the-art characterization tools located in a dedicated laboratory of more 2,500m2, staffed by approximately 80 researchers and students.

This platform, unique in Europe, enables the development of novel techniques and competencies in order to address new challenges in characterization for micro- and nanoelectronics and materials for energy and nanosciences.

The platform provides support in characterization for internal CEA-Leti programs and also offers academic and industrial partners access to Leti’s characterization tool set and expertise to address some of their technological challenges.

Within the framework of the Europe’s Basic Technological Research network (RTB), the Nano-Characterization Platform has continued to acquire and develop characterization techniques and tools, including:

• The lastest-generation PHI 700Xi Auger Nanoprobe to investigate the surface-chemical composition of advanced nanostructures with a lateral resolution of 10nm, for applications in micro- and nano-electronics.
  
  
• The first new-generation atom probe tomography tool from Cameca to allow 3D compositional characterization at the atomic scale of advanced nanodevices and nano-objects.
  
  
• The Titan Cube pico: the latest-generation transmission electron microscope from FEI Company, including an ultra-stable platform and a new high-brightness source to offer a spatial resolution of 50-micron pitch and an energy resolution of 0.1 eV. These features can address high-resolution applications for 2D- and 3D-material characterization and chemical analysis, down to the atomic level.
  
  
• Variable-temperature atomic force microscope (AFM): Omicron scanning probe microscope to characterize the topography as well as the electrical properties (surface potential, resistance, etc) of advanced materials at deca-nanometric scale under ultra-high vacuum.

In 2010, we launched a common lab with FEI to combine the expertise of CEA-Leti and FEI in transmission-electron-microscopy applications with the capabilities of FEI’s new Titan Pico transmission electron microscope.